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RK-Series Semprex Stage
    RK-Series Semprex Stage
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    • RK-Series Semprex Stage

      Product Code: RKSER
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    RK440 Measuring Microscope Stage w/Digital Readout

    • Individual X and Y leadscrew controls for fine movement and quick-release handles for rapid positioning
    • Thin cross-section (1.6") allows RK250 and RK300 stages to mount on full-frame microscopes such as Nikon 300 and Olympus MX50
    • Wafer holders from 50 to 300 mm (2 to 12 inches) available
    • Custom flat-panel holders can be designed to hold a single large panel or multiple small panels
    • Proprietary Rigid-Kore provides exceptional stability and accuracy
    • High quality stainless steel leadscrews
    • Cross-roller bearing slides made from single piece hardened alloy steel for excellent flatness and rigidity
    • Available with 1 or 0.5 micron resolution encoders
    • Linear accuracy, flatness, and straightness of travel calibrated to less than 1 micron error in 3000
    • 2-axis digital readout with large LED display and RS232 serial interface included

    Technical Specifications

    Part Number Description
    12-1082.00 RK250 Leadscrew Stg, 250x250mm/10x10", Reflected - Solid Top
    12-1282.00 RK300 Leadscrew Stg, 300x300mm/12x12", Reflected - Solid Top
    12-1780.00 RK440 Leadscrew Stg, 440x350mm/17x14", Transm - Open Frame
    14-2100.51 X-Y Linear Encoders, 0.5 micron, with Digital Readout
    14-2101.01 X-Y Linear Encoders, 1.0 micron, with Digital Readout
    14-3009.12 Optional Z-Axis Indicator (30mm), 0.25 micron w/3rd Axis DRO

    *Specifications subject to change without notice.

    Ordering Information:

    A microscope mount MUST be specified (see Mounting)

    See Stage Accessories for Wafer Inspection add-ons.

    For custom flat panel holders, please request quotation.

    See Digital Readouts and Metrology Systems for more information.

    See Z-Axis Measuring System for more information.

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    Spectra carries a wide variety of stages. Select from one of the manufacturers below to find what you need.