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K-Series-M Semprex Stage
    K-Series-M Semprex Stage
    Purchase K-Series-M Semprex Stage
    • K-Series-M Semprex Stage

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      Product Code: KSERM
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    K-Series-M

    K88 Measuring Microscope Stage shown with Plasti-Slide Set & Rotating Wafer Puck Paddle


    Features
    • Drop-down coaxial large metal knobs
    • Available with 5 or 1 micron resolution linear encoders
    • Thin cross-section (0.96" to 1.17") allows stage to work with most microscopes including Leica, Mitutoyo, Nikon, Olympus, and Zeiss
    • Large variety of accessories for mask and wafer inspection
    • Rigid and durable proprietary KORE-FRAME design directly links X and Y axes in single piece of metal, providing excellent squareness, flatness, and precision
    • Linear accuracy calibrated to less than 1 micron error in 5000; flatness and straightness of travel better than 1 in 5000
    • Unique all hardened steel friction drive for backlash-free operation prevents damage even when forced against the end-stops
    • Proven to outperform and last much longer than other systems
    • Roller bearing slide mechanism made from single piece hardened alloy steel uses cross-roller bearings for extra precision and rigidity
    • 2-axis digital readout with large LED display and RS232 serial interface included

    Technical Specifications

    Part Number Description
    142-642-9# K64 Stage, 6x4 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert
    142-643-9# K64 Stage, 6x4 X-Y, 0.5um resolution, Reflected Light
    142-662-8# K66 Stage, 6x6 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert
    142-663-5# K66 Stage, 6x6 X-Y, 0.5um resolution, Reflected Light
    142-882-5# K88 Stage, 8x8 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert
    142-883-8# K88 Stage, 8x8 X-Y, 0.5um resolution, Reflected Light
    142-922-5# K300 Stage, 12x10 X-Y, 0.5um resolution, Transm. Light w/Glass Insert
    142-923-5# K300 Stage, 12x12 X-Y, 0.5um resolution, Reflected Light

    *Specifications subject to change without notice.

    Ordering Information:

    1) A microscope stage mount MUST be specified (see Mounting), otherwise D102 Hole Pattern will be provided.

    2) For knob style, please specify # as:
    0 = Small 1.5" diam, Short 1.5" (Standard)
    1 = Small 1.5" diam, Long 2.5"
    2 = Large 2.25" diam, Short 1.5"
    3 = Large 2.25" diam, Long 2.5"

    Accessories

    See Mask & Pelicle Inspection Accessories
    See Wafer Inspection Accessories

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    Spectra carries a wide variety of stages. Select from one of the manufacturers below to find what you need.