Measuring Microscope Stage shown with Plasti-Slide Set &
Rotating Wafer Puck Paddle
coaxial large metal knobs
Available with 5 or 1 micron resolution linear encoders
Thin cross-section (0.96" to 1.17") allows stage
to work with most microscopes including Leica, Mitutoyo,
Nikon, Olympus, and Zeiss
Large variety of accessories for mask and wafer inspection
Rigid and durable proprietary KORE-FRAME design directly
links X and Y axes in single piece of metal, providing excellent
squareness, flatness, and precision
Linear accuracy calibrated to less than 1 micron error in
5000; flatness and straightness of travel better than 1
all hardened steel friction drive for backlash-free operation
prevents damage even when forced against the end-stops
to outperform and last much longer than other systems
bearing slide mechanism made from single piece hardened
alloy steel uses cross-roller bearings for extra precision
digital readout with large LED display and RS232 serial
||K64 Stage, 6x4 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert
||K64 Stage, 6x4 X-Y, 0.5um resolution, Reflected Light
||K66 Stage, 6x6 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert
||K66 Stage, 6x6 X-Y, 0.5um resolution, Reflected Light
||K88 Stage, 8x8 X-Y, 0.5um resolution, Transmitted Light w/Glass Insert
||K88 Stage, 8x8 X-Y, 0.5um resolution, Reflected Light
||K300 Stage, 12x10 X-Y, 0.5um resolution, Transm. Light w/Glass Insert
||K300 Stage, 12x12 X-Y, 0.5um resolution, Reflected Light
subject to change without notice.
1) A microscope stage mount MUST be specified (see Mounting), otherwise D102 Hole Pattern will be provided.
2) For knob style, please specify # as:
0 = Small 1.5" diam, Short 1.5" (Standard)
1 = Small 1.5" diam, Long 2.5"
2 = Large 2.25" diam, Short 1.5"
3 = Large 2.25" diam, Long 2.5"
See Mask & Pelicle Inspection Accessories
See Wafer Inspection Accessories