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TC64 Peltier-Based Thermal Chuck
    TC64 Peltier-Based Thermal Chuck
    Purchase TC64 Peltier-Based Thermal Chuck
    • TC64 Peltier-Based Thermal Chuck

      SKU:
      Product Code: INSTCHCKTC64
      Vendor: Instec
    • Quantity in Basket:  None

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    Features

    • Peltier Based Thermal Chuck
    • Programmable Precision Temperature Control from -20°C to 90°C with 0.1°C Temperature Precision
    • Accommodates Up To 4" Wafer
    • Low Surface Temperature Gradients
    • Independent Vacuum Channels for Small or Large Wafer Sizes
    • Thin Enough to Sit on Microscope or Other Probing Stages
    • Optional Cover Available for Gas Purging
    • Configured with STC200 Standalone Temperature Controller with RS232 Communication Port and Windows Based Software
    • Optional IEEE488 Communication Port
    • Free LabVIEW Drivers for IEEE488 and RS232

    Specifications

    Control Method Auto-tune PID (Non-switch PID control optional)
    Temperature Control Sensor Platinum RTD
    Surface Flatness 0.001" at room temperature
    Temperature Range -20°C to 90°C
    Temperature Precision 0.1°C
    Temperature Stability ±0.2°C at 60°C
    Temperature Uniformity ±0.1°C/cm or ±0.25% of set temperature (better uniformity optional)
    Heating Rate 2 minutes from ambient to 60°C
    Height (Approximate) 1.0"
    Wafer Size From 0.2" to 4"