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    • Square Hot/Cold Chucks

      SKU:
      Product Code: INSTCHCKS
      Vendor: Instec
    • Quantity in Basket:  None

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    Overview

    Instec thermal chuck systems provide ultra temperature uniformity and stability (better than ±0.1°C). The flat surface of the Hot and Cold Chuck is precision temperature controlled and ideal for probing, characterization and failure analysis of semiconductors wafers. The hot and cold chuck can also be used for LCD thermal cycling.

    Instec's basic thermal chuck systems consist of a thermal wafer vacuum chuck, a STC200 Series standalone temperature controller, and WinTemp - a Windows based software.

    Features

    • Precision Temperature Control from -40°C to 310°C with 0.1°C Temperature Precision
    • Low Surface Temperature Gradients
    • Independent Vacuum Channels for Small or Large Wafer Sizes
    • Thin Enough to Sit on Microscope or Other Probing Stages
    • Optional Triaxial Heater Available for Eliminating Electrical Noise
    • Chuck Surface Available as a Grounded or Floating Surface
    • Configured with STC200 Standalone Temperature Controller with RS232 Communication Port and Windows Based Software
    • Optional IEEE488 Communication Port
    • Free LabVIEW Drivers for IEEE488 and RS232
    • Higher Temperature Limits Available through Special Order

    Specifications

    Model Wafer Size (min / max) Temperature Range* Maximum Heating Rate
    HCC214S 12mm (0.5") / 100mm (4") -40°C to 200°C 60°C/minute at 100°C
    HCC314S 12mm (0.5") / 100mm (4") -40°C to 310°C 60°C/minute at 100°C
    HCC216S 12mm (0.5") / 150mm (6") -40°C to 310°C 60°C/minute at 100°C
    HCC316S 12mm (0.5") / 150mm (6") -40°C to 310°C 60°C/minute at 100°C
    HCC208S 50mm (2") / 200mm (8") -30°C to 310°C 50°C/minute at 100°C
    HCC308S 50mm (2") / 200mm (8") -30°C to 310°C 50°C/minute at 100°C