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Round Hot/Cold Chucks
    Round Hot/Cold Chucks
    Purchase Round Hot/Cold Chucks
    • Round Hot/Cold Chucks

      SKU:
      Product Code: INSTCHCKR
      Vendor: Instec
    • Quantity in Basket:  None

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    Overview

    Instec hot and cold chuck systems provide ultra temperature uniformity and stability (better than ±0.1°C). The flat surface of the Hot and Cold Chuck is precision temperature controlled and ideal for probing, characterization and failure analysis of semiconductors wafers. The hot and cold chuck can also be used for LCD thermal cycling.

    Instec's basic hot and cold chuck systems consist of a thermal wafer vacuum chuck, a STC200 Series standalone temperature controller, and WinTemp - a Windows based software.

    Features

    • Precision Temperature Control from -40°C to 310°C with 0.1°C Temperature Precision
    • Low Surface Temperature Gradients
    • Independent Vacuum Channels for Small or Large Wafer Sizes
    • Thin Enough to Sit on Microscope or Other Probing Stages
    • Optional Triaxial Heater Available for Eliminating Electrical Noise
    • Chuck Surface Available as a Grounded or Floating Surface
    • Configured with STC200 Standalone Temperature Controller with RS232 Communication Port and Windows Based Software
    • Optional IEEE488 Communication Port
    • Free LabVIEW Drivers for IEEE488 and RS232 vHigher Temperature Limits Available through Special Order

    Specifications

    Model Wafer Size (min / max) Temperature Range* Maximum Heating Rate
    HCC206R 12mm (0.5") / 150mm (6") -40°C to 200°C 60°C/minute at 100°C
    HCC306R 12mm (0.5") / 150mm (6") -40°C to 200°C 60°C/minute at 100°C
    HCC208R 50mm (2") / 200mm (8") -30°C to 200°C 50°C/minute at 100°C
    HCC308R 50mm (2") / 200mm (8") -30°C to 200°C 50°C/minute at 100°C
    HCC20CR 50mm (2") / 300mm (12") -20°C to 200°C 40°C/minute at 100°C
    HCC30CR 50mm (2") / 300mm (12") -20°C to 200°C 40°C/minute at 100°C